Silicon nitride transmission X-ray mirrors

نویسندگان

  • Sterling Cornaby
  • Donald H. Bilderback
چکیده

Transmission X-ray mirrors have been fabricated from 300-400 nm-thick low-stress silicon nitride windows of size 0.6 mm x 85 mm. The windows act as a high-pass energy filter at grazing incidence in an X-ray beam for the beam transmitted through the window. The energy cut-off can be selected by adjusting the incidence angle of the transmission mirror, because the energy cut-off is a function of the angle of the window with respect to the beam. With the transmission mirror at the target angle of 0.22 degrees , a 0.3 mm x 0.3 mm X-ray beam was allowed to pass through the mirror with a cut-off energy of 10 keV at the Cornell High Energy Synchrotron Source. The energy cut-off can be adjusted from 8 to 12 keV at an angle of 0.26 degrees to 0.18 degrees , respectively. The observed mirror transmittance was above 80% for a 300 nm-thick film.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

تهیه نانوپودر نیترید سیلیسیم تحت دو مرحله آسیاب‌کاری مکانیکی و عملیات حرارتی

In this study, synthesis of silicon nitride by mechanical alloying and the effects of important parameters of milling time and heat treatment temperature, time and rate are presented. Silicon micro powder and nitrogen gas were used as precursor materials. Synthesized phases, morphology and particle size were investigated by X-ray diffraction pattern (XRD) and Field emission scanning electron mi...

متن کامل

Temperature dependent soft x-ray absorption spectroscopy of liquids.

A novel sample holder is introduced which allows for temperature dependent soft x-ray absorption spectroscopy of liquids in transmission mode. The setup is based on sample cells with x-ray transmissive silicon nitride windows. A cooling circuit allows for temperature regulation of the sample liquid between -10 °C and +50 °C. The setup enables to record soft x-ray absorption spectra of liquids i...

متن کامل

Dislocation structure and crystallite size-distribution in hexagonal nanomaterials from X-ray peak profile analysis

The microstructure of three different nanocrystalline materials with hexagonal crystal structure are studied by X-ray diffraction peak profile analysis. The crystallite size distribution and the dislocation structure are determined in plasmathermal silicon nitride powder, sintered tungsten carbide and severely deformed titanium and are compared with transmission electron microscopy (TEM) result...

متن کامل

PEALD-Grown Crystalline AlN Films on Si (100) with Sharp Interface and Good Uniformity

Aluminum nitride (AlN) thin films were deposited on Si (100) substrates by using plasma-enhanced atomic layer deposition method (PEALD). Optimal PEALD parameters for AlN deposition were investigated. Under saturated deposition conditions, the clearly resolved fringes are observed from X-ray reflectivity (XRR) measurements, showing the perfectly smooth interface between the AlN film and Si (100)...

متن کامل

Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices

In this work, aluminum nitride (AlN) thin films with different thicknesses were deposited on quartz and  silicon  substrates  using  single  ion  beam  sputtering  technique.  The  physical  and  chemical properties  of  prepared  films  were  investigated  by  different  characterization  technique.  X-ray diffraction (XRD) spectra revealed that all of the deposited films have an amorphous str...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:
  • Journal of Synchrotron Radiation

دوره 15  شماره 

صفحات  -

تاریخ انتشار 2008